Development of a model for high precursor conversion efficiency pulsed-pressure chemical vapor deposition (PP-CVD) processing

Simple item page
dc.contributor.authorCave, H.M.
dc.contributor.authorKrumdieck, S.
dc.contributor.authorJermy, M.C.
dc.date.accessioned2007-07-13T02:35:03Z
dc.date.available2007-07-13T02:35:03Z
dc.date.issued2006en
dc.description.abstractA model of the movement of precursor particles in the unsteady Pulsed-Pressure Chemical Vapour Deposition (PP-CVD) process is developed to study the high conversion efficiencies observed experimentally in this process. Verification of the modelling procedures was conducted through a study of velocity persistence in an equilibrium gas and through Direct Simulation Monte Carlo (DSMC) simulations of unsteady self-diffusion processes. The model results demonstrate that in the PP-CVD process the arrival time for precursor particles at the deposition surface is much less than the reactor pump-down time, resulting in high precursor conversion efficiencies. Higher conversion efficiency was found to correlate with smaller size solvent molecules and moderate reactor peak pressure.en
dc.identifier.citationCave, H.M., Krumdieck, S.P. Jermy, M.C. (2006) Development of a model for high precursor conversion efficiency pulsed-pressure chemical vapor deposition (PP-CVD) processing. Christchurch, New Zealand: Process Intensification and Innovation Process (PI2) Conference II, 24-29 Sep 2006.en
dc.identifier.urihttp://hdl.handle.net/10092/202
dc.language.isoen
dc.publisherUniversity of Canterbury. Mechanical Engineering.en
dc.rights.urihttps://hdl.handle.net/10092/17651en
dc.subjectPulsed pressure chemical vapour deposition (PP-CVD)en
dc.subjectPrecursor conversion efficiencyen
dc.subjectDiffusionen
dc.subjectDSMCen
dc.subjectProcess modellingen
dc.subject.marsdenFields of Research::290000 Engineering and Technology::290500 Mechanical and Industrial Engineering::290501 Mechanical engineeringen
dc.subject.marsdenFields of Research::290000 Engineering and Technology::291400 Materials Engineering::291499 Materials engineering not elsewhere classifieden
dc.titleDevelopment of a model for high precursor conversion efficiency pulsed-pressure chemical vapor deposition (PP-CVD) processingen
dc.typeConference Contributions - Published
Files
Original bundle
Now showing 1 - 1 of 1
Thumbnail Image
Name:
12603738_Main.pdf
Size:
294.85 KB
Format:
Adobe Portable Document Format
Download
Collections
Engineering: Conference Contributions