Deflection efficiency of self-transducing, self-sensing cantilevers suitable for fast-AFM, scanning probe lithography and array operation
Author
Rangelow, I.W.
Ivanov, T.
Hofer, M.
Angelov, T.
Holz, M.
Lenk, S.
Atanasov, I.
Kaestener, M.
Guliyev, E.
Roeser, D.
Gutschmidt, S.
Sattel, S.
Ahmad, A.