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    Deflection efficiency of self-transducing, self-sensing cantilevers suitable for fast-AFM, scanning probe lithography and array operation

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    12656210_IWR_etal_NMC_abstract.pdf (359.6Kb)
    Author
    Rangelow, I.W.
    Ivanov, T.
    Hofer, M.
    Angelov, T.
    Holz, M.
    Lenk, S.
    Atanasov, I.
    Kaestener, M.
    Guliyev, E.
    Roeser, D.
    Gutschmidt, S.
    Sattel, S.
    Ahmad, A.
    Date
    2015
    Permanent Link
    http://hdl.handle.net/10092/10892
    Subjects
    Field of Research::10 - Technology::1007 - Nanotechnology
    Collections
    • Engineering: Conference Contributions [2011]
    Rights
    https://hdl.handle.net/10092/17651

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