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Deflection efficiency of self-transducing, self-sensing cantilevers suitable for fast-AFM, scanning probe lithography and array operation
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12656210_IWR_etal_NMC_abstract.pdf (359.6Kb)
Author
Rangelow, I.W.
Ivanov, T.
Hofer, M.
Angelov, T.
Holz, M.
Lenk, S.
Atanasov, I.
Kaestener, M.
Guliyev, E.
Roeser, D.
Gutschmidt, S.
Sattel, S.
Ahmad, A.
Date
2015
Permanent Link
http://hdl.handle.net/10092/10892
Subjects
Field of Research::10 - Technology::1007 - Nanotechnology
Collections
Engineering: Conference Contributions
[2011]
Rights
https://hdl.handle.net/10092/17651
