Through-Mask Electrochemical Micromachining of Aluminum in Phosphoric Acid

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dc.contributor.authorBaldhoff T
dc.contributor.authorNock V
dc.contributor.authorMarshall AT
dc.date.accessioned2020-09-22T02:42:42Z
dc.date.available2020-09-22T02:42:42Z
dc.date.issued2017en
dc.date.updated2020-08-04T23:31:04Z
dc.description.abstract© The Author(s) 2017. Published by ECS. This is an open access article distributed under the terms of the Creative Commons Attribution 4.0 License (CC BY). Aluminum micro-channels have been machined in phosphoric acid via mass-transfer limited electrochemical dissolution through photoresistmasks. The results of shape evolution experiments using a rotating disk electrode are presented in terms of the dimensions, shape profile and uniformity of the machined micro-channels. The influences of applied potential, cumulative passed charge and hydrodynamic conditions on the shape evolution process are discussed. Experimental results are compared with a shape evolution model assuming the rate of aluminum removal is solely controlled by diffusive mass transfer. The degree of agreement between experimental and simulated results depends mainly on the hydrodynamic conditions in the electrochemical cell and indicates a shift from purely diffusive to mixed convective-diffusive mass transfer. The feasibility of electrochemical aluminum micromachining is demonstrated by fabricating microfluidic test structures with well-defined geometries and smooth surfaces.en
dc.identifier.citationBaldhoff T, Nock V, Marshall AT (2017). Through-Mask Electrochemical Micromachining of Aluminum in Phosphoric Acid. Journal of The Electrochemical Society. 164(9). E194-E202.en
dc.identifier.doihttp://doi.org/10.1149/2.0441709jes
dc.identifier.issn0013-4651
dc.identifier.issn1945-7111
dc.identifier.urihttps://hdl.handle.net/10092/101062
dc.languageen
dc.language.isoen
dc.publisherThe Electrochemical Societyen
dc.rightsAll rights reserved unless otherwise stateden
dc.rights.urihttp://hdl.handle.net/10092/17651en
dc.subject.anzsrcFields of Research::40 - Engineering::4017 - Mechanical engineering::401705 - Microelectromechanical systems (MEMS)en
dc.titleThrough-Mask Electrochemical Micromachining of Aluminum in Phosphoric Aciden
dc.typeJournal Articleen
uc.collegeFaculty of Engineering
uc.departmentElectrical and Computer Engineering
uc.departmentChemical and Process Engineering
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