Investigation of the dynamics of coupled cantilever arrays on a micro and macro scale with applications to AFM

dc.contributor.authorJackson, S.
dc.contributor.authorRoeser, D.
dc.contributor.authorGutschmidt, S.
dc.contributor.authorSattel, T.
dc.date.accessioned2015-09-28T22:39:34Z
dc.date.available2015-09-28T22:39:34Z
dc.date.issued2015en
dc.description.abstractSince the invention of atomic force microscopy (AFM) researchers have been trying to increase imaging speed. One method is to bring multiple cantilever probes together in close proximity to form an array. By using each probe independently, multiple points on a sample can be imaged simultaneously. AFM arrays have been developed and produced by the Rangelow research group under the PRONANO project at Technische Universität Ilmenau [1]. These arrays are fabricated from multi-layer silicon beams and have bimetallic heater actuators and piezo-resistive sensors incorporated into each probe, allowing for individual actuation and sensing (Figure 1). Due to the close proximity of the cantilevers, the system response exhibits coupling phenomena (mechanical, electrical, thermal and fluidic). The way this coupling affects the dynamics of each beam and the system as a whole is not fully understood.en
dc.identifier.citationJackson, S., Roeser, D., Gutschmidt, S., Sattel, T. (2015) Investigation of the dynamics of coupled cantilever arrays on a micro and macro scale with applications to AFM. Auckland, New Zealand: 12th International Workshop on Nanomechanical Sensing, 13-15 Jul 2015.en
dc.identifier.urihttp://hdl.handle.net/10092/10993
dc.language.isoen
dc.publisherUniversity of Canterbury. Mechanical Engineeringen
dc.rights.urihttps://hdl.handle.net/10092/17651en
dc.subject.anzsrcFields of Research::40 - Engineering::4099 - Other engineering::409902 - Engineering instrumentationen
dc.titleInvestigation of the dynamics of coupled cantilever arrays on a micro and macro scale with applications to AFMen
dc.typeConference Contributions - Other
Files
Original bundle
Now showing 1 - 1 of 1
Loading...
Thumbnail Image
Name:
12656211_NMC_abstract_SJ_DR_SG_TS.pdf
Size:
452.53 KB
Format:
Adobe Portable Document Format