Static and dynamic experimental investigations of a micro-electromechanical cantilever in air and vacuum

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dc.contributor.authorGutschmidt, S.
dc.contributor.authorRochus, V.
dc.contributor.authorGolinval, J.
dc.date.accessioned2009-09-09T22:07:07Z
dc.date.available2009-09-09T22:07:07Z
dc.date.issued2009en
dc.description.abstractThe dynamic response of electro-mechanically actuated micro structures is governed by nonlinear effects which directly influence their performance. To date, most work in the field of micro/nano systems is done experimentally and documented theoretical research consists of nonlinear lumped-mass models as well as continuum mechanics approaches. Existing and codified computational tools for micro-electromechanical systems (MEMS) more and more penetrate the market of designers and fabrication of such devices. The present work is the experimental part of a bench-mark study of a selected microbeam structure investigated with aforementioned analytical and computational techniques and compared to experiments performed with a Polytec MSA400 analyzer. The emphasis of this benchmark study is put on the nonlinear dynamic behavior with respect to qualitative and quantitative explanations of the electro-mechanical actuation and damping mechanisms.en
dc.identifier.citationGutschmidt, S., Rochus, V., Golinval, J. (2009) Static and dynamic experimental investigations of a micro-electromechanical cantilever in air and vacuum. Delft, The Netherlands: 10th International Conference on Thermal, Mechanical and Multi-Physics simulation and Experiments in Microelectronics and Microsystems. EuroSimE 2009, 26-29 Apr 2009.en
dc.identifier.doihttps://doi.org/10.1109/ESIME.2009.4938475
dc.identifier.urihttp://hdl.handle.net/10092/2821
dc.language.isoen
dc.publisherUniversity of Canterbury. Mechanical Engineeringen
dc.rights.urihttps://hdl.handle.net/10092/17651en
dc.subject.marsdenFields of Research::290000 Engineering and Technology::291800 Interdisciplinary Engineering::291804 Nanotechnologyen
dc.subject.marsdenFields of Research::290000 Engineering and Technology::290900 Electrical and Electronic Engineering::290901 Electrical engineeringen
dc.subject.marsdenFields of Research::290000 Engineering and Technology::290500 Mechanical and Industrial Engineering::290501 Mechanical engineeringen
dc.titleStatic and dynamic experimental investigations of a micro-electromechanical cantilever in air and vacuumen
dc.typeConference Contributions - Published
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