Direct comparison of stylus and resonant methods for determining Young's Modulus of single and multilayer MEMS cantilevers

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dc.contributor.authorBoyd, E.
dc.contributor.authorNock, V.
dc.contributor.authorWeiland, D.
dc.contributor.authorLi, X.
dc.contributor.authorUttamchandani, D.
dc.date.accessioned2011-10-12T01:22:28Z
dc.date.available2011-10-12T01:22:28Z
dc.date.issued2011en
dc.description.abstractAs microelectromechnical systems (MEMS) becomes more complex and are produced in even greater numbers it becomes increasingly important to have a full understanding of the mechanical properties of the commonly used MEMS materials. One of the most important properties for MEMS is the Young’s modulus. This work describes the direct comparison of two methods often used for measuring the Young’s modulus of thin film materials using micro-cantilever test structures: a load-deflection method and a resonant frequency method. The comparison was carried out for a range of materials, different cantilever geometries as well as for single and multilayer materials. It was found that both methods produce results that agree with each other and also agree with the values most often given in the literature.en
dc.identifier.citationBoyd, E., Nock, V., Weiland, D., Li, X., Uttamchandani, D. (2011) Direct comparison of stylus and resonant methods for determining Young's Modulus of single and multilayer MEMS cantilevers. Sensors and Actuators A: Physical, (in press).en
dc.identifier.doihttps://doi.org/10.1016/j.sna.2011.09.022
dc.identifier.issn0924-4247
dc.identifier.urihttp://hdl.handle.net/10092/5625
dc.language.isoen
dc.publisherUniversity of Canterbury. Electrical and Computer Engineeringen
dc.rights.urihttps://hdl.handle.net/10092/17651en
dc.subjectYoung’s Modulusen
dc.subjectelastic modulusen
dc.subjectMEMSen
dc.subjectmicro-cantileversen
dc.subjectresonant frequencyen
dc.subjectload-deflection methoden
dc.subjectmechanical characterisationen
dc.subject.anzsrcField of Research::09 - Engineeringen
dc.subject.anzsrcFields of Research::40 - Engineering::4017 - Mechanical engineering::401705 - Microelectromechanical systems (MEMS)en
dc.titleDirect comparison of stylus and resonant methods for determining Young's Modulus of single and multilayer MEMS cantileversen
dc.typeJournal Article
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