Nonlinear mode veering for enhanced resonant sensing
A research trend in micro systems for resonant sensing is a sensitivity enhancement utilizing nonlinear and coupling e ects, which is mainly applied to gas sensing and timing applications. In this article, we propose such an enhancement of the sensitivity for an atomic force microscopy probe. This scheme is based on a two beam array, where one beam is active and acting as probe, while the other beam is passive. Both beams of this array are designed to have an identical resonance frequency at a de ned distance between the active beam and a surface, in the mechanically uncoupled case. The occurring mode localization close to this distance and the nonlinear interaction potential lead to an increased sensitivity in this region, with respect to frequency change and amplitude ratio. The proposed scheme is experimentally validated with a macro-scale test setup, mimicking a microscale system.