Spatially-resolved 3ω thermal flow sensing for microfluidics and biology

Type of content
Conference Contributions - Published
Thesis discipline
Degree name
Publisher
IEEE
Journal Title
Journal ISSN
Volume Title
Language
Date
2019
Authors
Cheradame N
Calius E
Meffan, Robert Claude
Sellier, Mathieu
Nock, Volker
Abstract

This paper reports an alternating current (AC) thermal flow sensor, based on the 3ω method, capable of measuring fluid flow in stacked microfluidic channels and through separating membranes. The measurement concept is tested in a triple-layer polydimethylsiloxane (PDMS) device containing two parallel channels separated by a membrane. A 3ω element integrated into the bottom channel was used to determine the flow direction and magnitude in both channels. Our results show that the phase of the temperature wave is linked not only to fluid velocity, but the physical dimensions of the channel, thus providing a novel non-contact tool to probe fluid flows.

Description
Citation
Meffan C, Cheradame N, Sellier M, Calius E, Nock V (2019). Spatially-resolved 3ω thermal flow sensing for microfluidics and biology. Berlin, Germany: 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII). 23/06/2019-27/06/2019. TRANSDUCERS & EUROSENSORS XXXIII Proceedings. 1917-1920.
Keywords
Flow Sensing, 3ω Method, Thermal Penetration Depth, Polydimethylsiloxane Microfluidics
Ngā upoko tukutuku/Māori subject headings
ANZSRC fields of research
Fields of Research::40 - Engineering::4012 - Fluid mechanics and thermal engineering::401210 - Microfluidics and nanofluidics
Fields of Research::40 - Engineering::4017 - Mechanical engineering::401705 - Microelectromechanical systems (MEMS)
Fields of Research::40 - Engineering::4012 - Fluid mechanics and thermal engineering::401205 - Experimental methods in fluid flow, heat and mass transfer
Fields of Research::40 - Engineering::4009 - Electronics, sensors and digital hardware::400908 - Microelectronics
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