This paper presents the fabrication and characterization of novel normally closed hybrid dry-film/elastomer membrane valves for the integration of electrode arrays into lab-on-a-chip platforms for electrotaxis studies. We show valve design and fabrication processes used to integrate pneumatic microvalves with electrode arrays and fluidic handling structures. Applicability of the valves was demonstrated by compartmentalization of microspheres and motile zoospores of the oomycete Phytophthora nicotianae. As demonstrated by recordings of zoospore behaviour under applied electric fields, the hybrid valves provide a new platform technology to facilitate the investigation of microorganism electrotaxis in controlled environments at single-cell resolution.