Browsing College of Engineering by Subject "Absorbance Modulation Optical Lithography"
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Absorbance Modulation Optical Lithography: Simulating the Performance of an Adaptable Absorbance Mask in the Near-Field. (University of Canterbury. Electrical and Computer Engineering, 2010)The challenge for lithography today is to continue the reduction of feature size whilst facing severe theoretical and practical limitations. In 2006 Rajesh Menon and Hank Smith proposed a new lithography system named ...