Liquid droplet evaporation in simulations of the flow in pulsed-pressure MOCVD

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dc.contributor.authorLim, C-W, Cave, H.
dc.contributor.authorJermy, M.
dc.contributor.authorKrumdieck, S.
dc.date.accessioned2010-03-23T20:13:47Z
dc.date.available2010-03-23T20:13:47Z
dc.date.issued2009en
dc.description.abstractIn this paper, a numerical model of the liquid precursor droplet flash evaporation and transport is introduced. This droplet model is coupled with the Quiet Direct Simulation (QDS) scheme to model the unsteady flow development in a Pulsed Pressure MOCVD reactor. A preliminary simulation of the PP-MOCVD process including the injection and pump down phase is conducted. The simulation results are consistent with the measured pressure change in the PP-MOCVD process.en
dc.identifier.citationLim, C-W, Cave, H., Jermy, M., Krumdieck, S. (2009) Liquid droplet evaporation in simulations of the flow in pulsed-pressure MOCVD. Vienna, Austria: EuroCVD 17 and CVD XVII, 4-9 Oct 2009. ECS Transactions, 25, 8, 1251-1255.en
dc.identifier.doihttps://doi.org/10.1149/1.3207730
dc.identifier.urihttp://hdl.handle.net/10092/3628
dc.language.isoen
dc.publisherUniversity of Canterbury. Mechanical Engineeringen
dc.rights.urihttps://hdl.handle.net/10092/17651en
dc.subject.marsdenFields of Research::290000 Engineering and Technology::290500 Mechanical and Industrial Engineering::290501 Mechanical engineeringen
dc.subject.marsdenFields of Research::290000 Engineering and Technology::290300 Manufacturing Engineering::290399 Manufacturing engineering not elsewhere classifieden
dc.titleLiquid droplet evaporation in simulations of the flow in pulsed-pressure MOCVDen
dc.typeConference Contributions - Published
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