Pulsed-Pressure MOCVD science, materials and technology

Type of content
Conference Contributions - Published
Thesis discipline
Degree name
Publisher
University of Canterbury. Mechanical Engineering
Journal Title
Journal ISSN
Volume Title
Language
Date
2009
Authors
Krumdieck, S.
Abstract

Pulsed pressure processing from liquid MOCVD precursors has been studied over the past ten years. Extending the capabilities of CVD to applications like thermal barrier coatings, Solid Oxide Fuel Cells, and bio-integration coatings was the motivation for the original innovative concept. The systems engineering research has focused on development of a low-cost, high throughput method capable of providing high quality, uniform ceramic films on metal, ceramic or glass objects with complex 3-D geometry. The MOCVD research has focused on using low-cost, low-hazard precursors to deposit the desired materials with the required properties. This paper reviews the fundamentals of the PPMOCVD approach, the experience with precursors and thin films, and the advances of the system engineering toward several commercial applications.

Description
Invited Review Paper and Invited Keynote Presentation
Citation
Krumdieck, S. (2009) Pulsed-Pressure MOCVD science, materials and technology. Vienna, Austria: EuroCVD 17 and CVD XVII, 4-9 Oct 2009. ECS Transactions, 25, 8, 1209-1219.
Keywords
Ngā upoko tukutuku/Māori subject headings
ANZSRC fields of research
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