CVD flow field modelling using the quiet direct simulation (QDS) method (2009)
Type of ContentConference Contributions - Published
PublisherUniversity of Canterbury. Mechanical Engineering
AuthorsCave, H., Lim, C.-W., Jermy, M., Wu, J.-S., Smith, M.R., Krumdieck, S.show all
In this paper, the Quiet Direct Simulation (QDS) method is used to model the unsteady jet development in a Pulsed Pressure Chemical Vapour Deposition (PP-CVD) reactor. QDS is a novel method of gas flow simulation which is able to compute true-direction fluxes of mass, momentum and energy in a computationally efficient and accurate manner. The scheme is ideal for the simulation of novel CVD processes like PP-CVD which include highly unsteady flow structures which has previously proved extremely difficult to simulate. Here, the axisymmetric QDS solver is outlined and the injection phase of a PP-CVD reactor is simulated.
CitationCave, H., Lim, C-W, Jermy, M., Wu, J.S., Smith, M., Krumdieck, S. (2009) CVD flow field modelling using the quiet direct simulation (QDS) method. Vienna, Austria: EuroCVD 17 and CVD XVII, 4-9 Oct 2009. ECS Transactions, 25, 8, 389-393.
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