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    Static and dynamic experimental investigations of a micro-electromechanical cantilever in air and vacuum

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    12613744_eurosime2009_102.pdf (3.805Mb)
    Author
    Gutschmidt, S.
    Rochus, V.
    Golinval, J.
    Date
    2009
    Permanent Link
    http://hdl.handle.net/10092/2821

    The dynamic response of electro-mechanically actuated micro structures is governed by nonlinear effects which directly influence their performance. To date, most work in the field of micro/nano systems is done experimentally and documented theoretical research consists of nonlinear lumped-mass models as well as continuum mechanics approaches. Existing and codified computational tools for micro-electromechanical systems (MEMS) more and more penetrate the market of designers and fabrication of such devices. The present work is the experimental part of a bench-mark study of a selected microbeam structure investigated with aforementioned analytical and computational techniques and compared to experiments performed with a Polytec MSA400 analyzer. The emphasis of this benchmark study is put on the nonlinear dynamic behavior with respect to qualitative and quantitative explanations of the electro-mechanical actuation and damping mechanisms.

    Subjects
    Fields of Research::290000 Engineering and Technology::291800 Interdisciplinary Engineering::291804 Nanotechnology
     
    Fields of Research::290000 Engineering and Technology::290900 Electrical and Electronic Engineering::290901 Electrical engineering
     
    Fields of Research::290000 Engineering and Technology::290500 Mechanical and Industrial Engineering::290501 Mechanical engineering
    Collections
    • Engineering: Conference Contributions [2012]
    Rights
    https://hdl.handle.net/10092/17651

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