Nanometre-scale electrochemical switches fabricated using a plasma-based sulphidation technique (2006)
Type of ContentConference Contributions - Published
PublisherUniversity of Canterbury. Electrical and Computer Engineering.
AuthorsThomson, A.F., Melville, D.O.S., Blaikie, R.J.show all
Solid-state electrochemical switches are new devices that may find application in low power logic or memory circuits. The reversible electrochemical oxidation and reduction of a sub 10nm-thick silver sulphide layer is the critical process for these devices’ operation, which determines the switching speed and the OFF/ON resistance ratio. A new process has been developed for fabricating QCAS devices, including a novel SF6 plasma sulphidation technique for forming the critical silver sulphide switchable insulator layer. QCAS devices were successfully created with OFF/ON resistance ratios of up to 106, with switching speeds comparable to previous devices and far less problematic yields.
CitationThomson, A.F., Melville, D.O.S., Blaikie, R.J. (2006) Nanometre-scale electrochemical switches fabricated using a plasma-based sulphidation technique. Brisbane, Australia: 2006 International Conference on Nanoscience and Nanotechnology (ICONN 2006), 3-7 Jul 2006. Proceedings International Conference on Nanoscience and Nanotechnology 2006, 359-362.
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