Nanometre-scale electrochemical switches fabricated using a plasma-based sulphidation technique

Abstract

Solid-state electrochemical switches are new devices that may find application in low power logic or memory circuits. The reversible electrochemical oxidation and reduction of a sub 10nm-thick silver sulphide layer is the critical process for these devices’ operation, which determines the switching speed and the OFF/ON resistance ratio. A new process has been developed for fabricating QCAS devices, including a novel SF6 plasma sulphidation technique for forming the critical silver sulphide switchable insulator layer. QCAS devices were successfully created with OFF/ON resistance ratios of up to 106, with switching speeds comparable to previous devices and far less problematic yields.