Fabrication and characterisation of solid-state electrochemical switches (2006)
AuthorsFoulkes, J.E., Arnold, M.D., Blaikie, R.J.show all
Solid-state electrochemical switches, also known as Quantised Conductance Atomic Switches (QCAS), have been investigated using reversible conversion of silver to silver sulphide for the switching. Electron-beam lithography and a custom plasma-based sulphidation technique have been employed for device fabrication, and optical ellipsometry has been used to accurately characterise the sulphidation reaction. The sulphide layer that is formed saturates at a thickness of 10-12 nm, which is ideal for these devices. Prototype devices, fabricated using nichrome as the inert electrode, have an OFF/ON resistance ratio of 1000, with an on-state resistance of 90 Ω.
CitationFoulkes, J.E., Arnold, M.D., Blaikie, R.J. (2006) Fabrication and Characterisation of Solid-state Electrochemical Switches. Christchurch, New Zealand: 13th Electronics New Zealand Conference (ENZCON2006), 13-14 Nov 2006. Proceedings of the Thirteenth Electronics New Zealand Conference ENZCon'06, 157-162.
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