Rapid prototyping MEMS using Laminated Resin Printing (2020)
Type of ContentConference Contributions - Published
AuthorsJones, Harrison B., Moore, Ciaran Patrick, Best, Andrew D., Bubendorfer, Andrea J., Glasson, Neil D.show all
Interest in MEMS fabrication has been growing for the last 50 years; however, the number and quality of tools supporting rapid prototyping in this industry are limited. Laminated resin printing (LRP) combines maskless projector-based lithography with 3D printing techniques to facilitate the rapid production of high-resolution polymer structures in three dimensions with no retooling required. By selectively metalising these structures, high value functional MEMS devices can be rapidly produced, tested and iterated. Microcircuits, enclosed mechanical systems and devices based on cantilevers and membranes have all been demonstrated using this technique.
CitationJones H, Moore CP, Best A, Bubendorfer A, Glasson N (2020). Rapid prototyping MEMS using Laminated Resin Printing. Emerging Digital Micromirror Device Based Systems and Applications XII. 01/02/2020-06/02/2020. Emerging Digital Micromirror Device Based Systems and Applications XII.
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KeywordsLaminated Resin Printing; Polymer MEMS; MEMS; Microsystems; Microstructures; Micro 3D printing; Micro uidics; Soft Lithography
ANZSRC Fields of Research09 - Engineering::0913 - Mechanical Engineering::091306 - Micro Electro-Mechanical Systems (MEMS)
09 - Engineering::0912 - Materials Engineering::091209 - Polymers and Plastics
09 - Engineering::0910 - Manufacturing Engineering::091009 - Microtechnology
09 - Engineering::0910 - Manufacturing Engineering::091006 - Manufacturing Processes and Technologies (excl. Textiles)