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| Title: | Liquid droplet evaporation in simulations of the flow in pulsed-pressure MOCVD |
| Authors: | Lim, C-W, Cave, H.
Jermy, M.
Krumdieck, S. |
| Issue Date: | 2009 |
| Citation: | Lim, C-W, Cave, H., Jermy, M., Krumdieck, S. (2009) Liquid droplet evaporation in simulations of the flow in pulsed-pressure MOCVD. Vienna, Austria: EuroCVD 17 and CVD XVII, 4-9 Oct 2009. ECS Transactions, 25, 8, 1251-1255. |
| Source: | http://dx.doi.org/10.1149/1.3207730 |
| Abstract: | In this paper, a numerical model of the liquid precursor droplet flash evaporation and transport is introduced. This droplet model is coupled with the Quiet Direct Simulation (QDS) scheme to model the unsteady flow development in a Pulsed Pressure MOCVD reactor. A preliminary simulation of the PP-MOCVD process including the injection and pump down phase is conducted. The simulation results are consistent with the measured pressure
change in the PP-MOCVD process. |
| Publisher: | University of Canterbury. Mechanical Engineering |
| Research Fields: | Fields of Research::290000 Engineering and Technology::290500 Mechanical and Industrial Engineering::290501 Mechanical engineering
Fields of Research::290000 Engineering and Technology::290300 Manufacturing Engineering::290399 Manufacturing engineering not elsewhere classified |
| URI: | http://hdl.handle.net/10092/3628 |
| Rights URI: | http://library.canterbury.ac.nz/ir/rights.shtml |
| Appears in Collections: | Conference Contributions
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