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Please use this identifier to cite or link to this item: http://hdl.handle.net/10092/3627

Title: CVD flow field modelling using the quiet direct simulation (QDS) method
Authors: Cave, H.
Lim, C.-W.
Jermy, M.
Wu, J.-S.
Smith, M.R.
Krumdieck, S.
Issue Date: 2009
Citation: Cave, H., Lim, C-W, Jermy, M., Wu, J.S., Smith, M., Krumdieck, S. (2009) CVD flow field modelling using the quiet direct simulation (QDS) method. Vienna, Austria: EuroCVD 17 and CVD XVII, 4-9 Oct 2009. ECS Transactions, 25, 8, 389-393.
Source: http://dx.doi.org/10.1149/1.3207617
Abstract: In this paper, the Quiet Direct Simulation (QDS) method is used to model the unsteady jet development in a Pulsed Pressure Chemical Vapour Deposition (PP-CVD) reactor. QDS is a novel method of gas flow simulation which is able to compute true-direction fluxes of mass, momentum and energy in a computationally efficient and accurate manner. The scheme is ideal for the simulation of novel CVD processes like PP-CVD which include highly unsteady flow structures which has previously proved extremely difficult to simulate. Here, the axisymmetric QDS solver is outlined and the injection phase of a PP-CVD reactor is simulated.
Publisher: University of Canterbury. Mechanical Engineering
Research Fields: Fields of Research::290000 Engineering and Technology::291800 Interdisciplinary Engineering::291801 Fluidisation and fluid mechanics
Fields of Research::290000 Engineering and Technology::290600 Chemical Engineering::290699 Chemical engineering not elsewhere classified
Fields of Research::290000 Engineering and Technology::290500 Mechanical and Industrial Engineering::290501 Mechanical engineering
URI: http://hdl.handle.net/10092/3627
Rights URI: http://library.canterbury.ac.nz/ir/rights.shtml
Appears in Collections:Engineering: Conference Contributions

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