|
|
UC Home > Library >
UC Research Repository >
College of Engineering >
Conference Contributions >
Please use this identifier to cite or link to this item:
http://hdl.handle.net/10092/3627
|
| Title: | CVD flow field modelling using the quiet direct simulation (QDS) method |
| Authors: | Cave, H.
Lim, C.-W.
Jermy, M.
Wu, J.-S.
Smith, M.R.
Krumdieck, S. |
| Issue Date: | 2009 |
| Citation: | Cave, H., Lim, C-W, Jermy, M., Wu, J.S., Smith, M., Krumdieck, S. (2009) CVD flow field modelling using the quiet direct simulation (QDS) method. Vienna, Austria: EuroCVD 17 and CVD XVII, 4-9 Oct 2009. ECS Transactions, 25, 8, 389-393. |
| Source: | http://dx.doi.org/10.1149/1.3207617 |
| Abstract: | In this paper, the Quiet Direct Simulation (QDS) method is used to model the unsteady jet development in a Pulsed Pressure Chemical Vapour Deposition (PP-CVD) reactor. QDS is a novel method of gas flow simulation which is able to compute true-direction fluxes of mass, momentum and energy in a computationally efficient and accurate manner. The scheme is ideal for the simulation of novel CVD processes like PP-CVD which include highly unsteady flow structures which has previously proved extremely difficult to simulate. Here, the axisymmetric QDS solver is outlined and the injection phase of a PP-CVD reactor is simulated. |
| Publisher: | University of Canterbury. Mechanical Engineering |
| Research Fields: | Fields of Research::290000 Engineering and Technology::291800 Interdisciplinary Engineering::291801 Fluidisation and fluid mechanics
Fields of Research::290000 Engineering and Technology::290600 Chemical Engineering::290699 Chemical engineering not elsewhere classified
Fields of Research::290000 Engineering and Technology::290500 Mechanical and Industrial Engineering::290501 Mechanical engineering |
| URI: | http://hdl.handle.net/10092/3627 |
| Rights URI: | http://library.canterbury.ac.nz/ir/rights.shtml |
| Appears in Collections: | Conference Contributions
|
Items in UC Research Repository are protected by copyright, with all rights reserved, unless otherwise indicated.
|
